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etayā-eva savicārā nirvicārā ca sūkṣma-viṣayā vyākhyātā

एतयैव सविचारा निर्विचारा च सूक्ष्मविषय व्याख्याता

By this, thus the process of subtle reflection, without and with refinement, for subtle objects is explained

etayā - by this

eva - thus

savicārā - unrefined subtle reflection

nirvicārā - refined subtle reflection

ca - and

sūkṣma - subtle; atomic; intangible

viṣaya - object

vyākhyātā - explained

Commentary by Paul Harvey:

By these same steps the process of reflection on a subtle object is explained, firstly in an unrefined stage of reflection, intermixed with words, purpose, knowledge and imagination around that object, and then in a refined stage, with a purification of memory, so as if empty of its own content; in the refined stage of reflection, only the true nature of the subtle object shines forth.